Ukuveliswa kwezinto ezisebenza ngobuchule obuphezulu kufuna okungaphezulu koomatshini be-CNC abaphucukileyo. Ngaphandle kokuhlukaniswa ngokungqongqo kwi-ambient seismic kunye ne-industrial vibration, akunakwenzeka ukufikelela kwi-sub-micron geometric tolerances. Zonke iimoto ezidlulayo, i-overhead crane ekufutshane, kunye ne-climate control compressor zizisa amaza e-micro-seismic anokonakalisa ukugoba kunye nokulinganiswa kweziseko ze-precision granite, ii-air bearings, kunye nezinto ze-ceramic.
Ukunciphisa oku, izakhiwo zoshishino kufuneka ziphathe umgangatho wokuvelisa njengenxalenye edibeneyo yenkqubo yemetrology.
I-Physics of Foundation Rigidization
Iifloor zekhonkrithi eziqhelekileyo zemizi-mveliso zihlala zinobukhulu obuyi-150 mm ukuya kwi-300 mm. Nangona zanele ukwenziwa kwezinto eziqhelekileyo kunye nokuhlanganiswa okunzima, azanele kwaphela ekuvelisweni kwinqanaba le-nanometer. Phantsi kwemithwalo enamandla, iifloor eziqhelekileyo zisebenza njenge-diaphragm, zithumela ukungcangcazela komgangatho okuphantsi ngokuthe ngqo kwiindawo zokusebenza.
Ukususa le vector yempazamo, iindawo zemveliso eziphambili ziphumeza isicwangciso seziseko zophuhliso esineemigangatho emininzi:
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Iziseko zoMkhosi eziNcinci kakhulu: Ukugalela ikhonkrithi eqinisiweyo ukuya kubunzulu obuncinci be-1000 mm kunika ibhloko enkulu ye-inertial. Le ngxinano ithomalalisa amaza aphantsi (1 - 10 Hz) ngaphambi kokuba afike kumatshini.
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Iitrenches Zokwahlukanisa Umjikelezo: Ukusika imisele yokwahlulahlula ukungcangcazela ejikeleze iindawo zemveliso—enobukhulu obuchanekileyo obufana nobubanzi obuyi-500 mm kunye nobunzulu obuyi-2000 mm—kuyahlula ngokwasemzimbeni indawo yokuvelisa echanekileyo ukusuka kwenye indawo. Le misele izaliswe zizinto ezikhethekileyo ze-elastomeric ezifunxa amandla ukuze kuncitshiswe amaza omlilo asecaleni.
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Ukuthulisa i-Acoustic kunye neMechanical: Iikhrayini eziphezulu kunye nee-gantry hoists zingumthombo omkhulu wengxolo engaphantsi kunye nokungcangcazela kwesakhiwo. Ukusebenzisa iinkqubo zokuhamba ezihamba nge-acoustic ezenziwe ngokwezifiso, ezifakwe i-acoustic, ezisebenza buthule, kuthintela amaza oxinzelelo lwe-acoustic ekuphazamiseni amanqanaba e-elektroniki abuthathaka kunye ne-laser interferometers ngexesha lemijikelo yokulinganisa.
Ukuvumelanisa Okusingqongileyo: Ubushushu kunye nokufuma
Ukwandiswa kobushushu yeyona nto inegalelo elikhulu kwimpazamo yejometri kwiigranite echanekileyokunye nokuveliswa kweseramikhi. Ukutshintsha kobushushu obuyi-0.5 ℃ kuphela kunokubangela ukuba ibhedi yegranite engama-5000 mm iguquguquke ngaphaya kokunyamezela okuvumelekileyo.
Ukuze kufezekiswe ukuchaneka okulinganayo, imeko yokucubungula kunye nokuhlanganisana kufuneka ilandele iiparameter ezingqongqo:
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Ukuvalwa Okupheleleyo Kwendalo: Ukwenziwa kwemveliso kufuneka kwenzeke kwiindawo zokucoca ezinkulu, ezivaliweyo (umz., 10,000㎡) apho ubushushu buvalelwe kwi-20℃ ± 0.2℃ kwaye umswakama ulawulwa ngokuqinileyo.
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Ulawulo lwesantya somoya: Iinkqubo zomoya we-Laminar kufuneka zenzelwe ukuthintela ukugqobhoza komoya ngokuthe ngqo, okuphezulu kumphezulu we-granite, ukuthintela ukuguguleka kobushushu bendawo.
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Ukulinganisa Igumbi Lokucoca Nge-Semiconductor: Ukuhlanganiswa kokugqibela kwee-gantries ze-granite ezine-axis ezininzi, izigaba ze-motor ezithe ngqo, kunye nee-air bearings ezichanekileyo kakhulu kufuna iindawo ezikhethekileyo, ezingenathuli ezifana ne-semiconductor fab yomsebenzisi wokugqibela. Oku kuqinisekisa ukuba akukho zingcoliseko ziphazamisana nezikhewu zokuthwala umoya, ezihlala ziphakathi kwe-5μm kunye ne-15μm.
Isishwankathelo
Ukwenziwa kwemveliso ngendlela echanekileyo kakhulu akunakubakho kwindawo eqhelekileyo yemizi-mveliso. Uzinzo lomgangatho wefektri, ukwahlulwa kweziseko, kunye nolawulo olupheleleyo lwe-thermodynamics yegumbi elicocekileyo zenza isiseko sobuchule bemetrological. Ukutyala imali kwiziseko ezinkulu ze-inertial kunye nokuhlukaniswa kwe-perimeter yindlela eqinisekisiweyo yokuqinisekisa ukuba ukwenziwa kwe-sub-micron kuhlala kuzinzile, kuyaphindaphindeka, kwaye kuyalandeleka.
Ixesha lokuthumela: Juni-15-2026