Izixhobo zegranite zisetyenziswa kakhulu kwinkqubo yokwenziwa kwee-semiconductor ngenxa yeempawu zazo ezibalaseleyo ezifana nokugqitywa okuphezulu komphezulu, ukuqina okuphezulu, kunye nokuxinana okugqwesileyo kokungcangcazela. Izixhobo zegranite zibalulekile kwizixhobo zokwenza ii-semiconductor, kubandakanya oomatshini be-lithography, oomatshini bokupolisha, kunye neenkqubo ze-metrology njengoko zibonelela ngokubeka ngokuchanekileyo kunye nozinzo ngexesha lenkqubo yokwenziwa. Nangona kukho zonke izibonelelo zokusebenzisa izixhobo zegranite, zikwanazo neziphene. Kweli nqaku, siza kuxoxa ngeziphene zezixhobo zegranite kwiimveliso zenkqubo yokwenziwa kwee-semiconductor.
Okokuqala, izinto zegranite zine-coefficient ephezulu yokwandisa ubushushu. Oku kuthetha ukuba zanda kakhulu phantsi koxinzelelo lobushushu, nto leyo enokubangela iingxaki ngexesha lenkqubo yokuvelisa. Inkqubo yokuvelisa i-semiconductor ifuna ukuchaneka okuphezulu kunye nokuchaneka kobukhulu obunokuphazamiseka ngenxa yoxinzelelo lobushushu. Umzekelo, ukuguquguquka kwe-silicon wafer ngenxa yokwandiswa kobushushu kunokubangela iingxaki zokulungelelaniswa ngexesha le-lithography, nto leyo enokubangela umonakalo kumgangatho wesixhobo se-semiconductor.
Okwesibini, izinto zegranite zineziphene ezibangela ukuvuza kwe-vacuum kwinkqubo yokwenziwa kwe-semiconductor. Ukubakho komoya okanye nayiphi na enye igesi kwinkqubo kunokubangela ungcoliseko kumphezulu we-wafer, nto leyo enokubangela iziphene ezinokuchaphazela ukusebenza kwesixhobo se-semiconductor. Iigesi ezingasebenziyo ezifana ne-argon kunye ne-helium zinokungena kwiindawo zegranite ezineziphene kwaye zenze amaqamza egesi anokuphazamisana nokuthembeka kwenkqubo ye-vacuum.
Okwesithathu, izinto zegranite zine-microfractures ezinokuphazamisana nokuchaneka kwenkqubo yokwenziwa. I-granite yinto ebuthathaka enokuthi ivelise ii-microfractures ngokuhamba kwexesha, ingakumbi xa ivezwa kwimijikelo yoxinzelelo oluqhubekayo. Ukubakho kwee-microfractures kunokukhokelela ekungazinzini kobukhulu, okubangela iingxaki ezibalulekileyo ngexesha lenkqubo yokwenziwa, njengokulungelelaniswa kwe-lithography okanye ukupolishwa kwe-wafer.
Okwesine, izinto zegranite zinokuguquguquka okulinganiselweyo. Inkqubo yokuvelisa i-semiconductor ifuna izixhobo eziguquguqukayo ezinokuthatha utshintsho lwenkqubo ezahlukeneyo. Nangona kunjalo, izinto zegranite ziqinile kwaye azinakuziqhelanisa notshintsho lwenkqubo ezahlukeneyo. Ke ngoko, naluphi na utshintsho kwinkqubo yokuvelisa lufuna ukususwa okanye ukutshintshwa kwezinto zegranite, nto leyo ekhokelela ekubeni zingasebenzi kwaye ichaphazele imveliso.
Okwesihlanu, izinto zegranite zifuna ukuphathwa kunye nokuthuthwa okukhethekileyo ngenxa yobunzima bazo kunye nobuthathaka bazo. Igranite yinto exineneyo nenzima efuna izixhobo ezikhethekileyo zokuphatha ezifana neekhreyini kunye neelifti. Ukongeza, izinto zegranite zifuna ukupakishwa kunye nokuthuthwa ngononophelo ukuthintela umonakalo ngexesha lokuthunyelwa, okukhokelela kwiindleko ezongezelelweyo kunye nexesha.
Ukuqukumbela, izinto zegranite zineengxaki ezithile ezinokuchaphazela umgangatho kunye nemveliso yeemveliso zenkqubo yokwenziwa kwee-semiconductor. Ezi ziphene zinokuncitshiswa ngokuphathwa ngononophelo kunye nokugcinwa kwezinto zegranite, kubandakanya ukuhlolwa rhoqo kwee-microfractures kunye neziphene ze-porosity, ukucocwa ngokufanelekileyo ukuthintela ungcoliseko, kunye nokuphathwa ngononophelo ngexesha lokuthuthwa. Nangona kukho iziphene, izinto zegranite zihlala ziyinxalenye ebalulekileyo yenkqubo yokwenziwa kwee-semiconductor ngenxa yokugqitywa kwazo okuphezulu komphezulu, ukuqina okuphezulu, kunye nokunciphisa ukungcangcazela okugqwesileyo.
Ixesha lokuthumela: Disemba-05-2023