Amacandelo e-granite asetyenziswe ngokubanzi kwinkqubo yokwenziwa kwe-semiconductor ngenxa yeempawu zabo ezibalaseleyo ezinjengokugqitywa komphezulu ongaphezulu, ukuqina okuphezulu, kunye nokuntywila okubalaseleyo.Amacandelo e-Granite ayimfuneko kwizixhobo zokwenziwa kwe-semiconductor, kubandakanywa oomatshini be-lithography, oomatshini bokupholisha, kunye neenkqubo ze-metrology njengoko zibonelela ngokuchaneka kokubeka kunye nokuzinza ngexesha lenkqubo yokuvelisa.Nangona zonke iingenelo zokusebenzisa amacandelo e-granite, nazo zineziphene.Kweli nqaku, siza kuxubusha iziphene zamacandelo e-granite kwiimveliso zenkqubo yokuvelisa i-semiconductor.
Okokuqala, amacandelo e-granite ane-coefficient ephezulu yokwandisa i-thermal.Kuthetha ukuba banda kakhulu phantsi koxinzelelo lwe-thermal, olunokubangela imiba ngexesha lenkqubo yokuvelisa.Inkqubo yokuvelisa i-semiconductor ifuna ukuchaneka okuphezulu kunye nokuchaneka kobukhulu obunokuthi bube sengozini ngenxa yoxinzelelo lwe-thermal.Umzekelo, i-silicon wafer deformation ngenxa yokwanda kwe-thermal inokubangela imiba yokulungelelaniswa ngexesha le-lithography, enokubeka esichengeni umgangatho wesixhobo se-semiconductor.
Okwesibini, amacandelo e-granite aneziphene ze-porosity ezinokubangela ukuvuza kwe-vacuum kwinkqubo yokuvelisa i-semiconductor.Ubukho bomoya okanye nayiphi na enye igesi kwisixokelelwano bunokubangela ungcoliseko kumphezulu we-wafer, okukhokelela kwiziphene ezinokuchaphazela ukusebenza kwesixhobo se-semiconductor.Iigesi ezingasebenziyo ezifana ne-argon kunye ne-helium zinokungena kwiinxalenye ze-granite ezinama-porous kwaye zidale amaqamza egesi anokuphazamisana nengqibelelo yenkqubo yokufunxa.
Okwesithathu, amacandelo e-granite ane-microfractures enokuphazamisa ukuchaneka kwenkqubo yokuvelisa.I-Granite yinto enqabileyo enokuthi iphuhlise i-microfractures ngokuhamba kwexesha, ngakumbi xa ibonakaliswe kwimijikelezo yoxinzelelo oluqhubekayo.Ubukho be-microfractures bunokukhokelela ekungazinzini komgangatho, kubangele imiba ebalulekileyo ngexesha lenkqubo yokwenziwa kwemveliso, efana nokulungelelaniswa kwe-lithography okanye i-wafer polishing.
Okwesine, amacandelo e-granite anokuguquguquka okulinganiselwe.Inkqubo yokuvelisa i-semiconductor ifuna izixhobo eziguquguqukayo ezinokuthatha utshintsho lwenkqubo eyahlukeneyo.Nangona kunjalo, amacandelo e-granite aqinile kwaye akakwazi ukuziqhelanisa neenguqu zenkqubo ezahlukeneyo.Ngoko ke, naluphi na utshintsho kwinkqubo yokuvelisa ifuna ukususwa okanye ukutshintshwa kwamacandelo e-granite, okukhokelela ekunciphiseni ixesha kunye nokuchaphazela imveliso.
Okwesihlanu, amacandelo e-granite afuna ukuphathwa okukhethekileyo kunye nokuthutha ngenxa yobunzima kunye nobuthathaka.I-Granite yimathiriyeli eshinyeneyo nenzima efuna izixhobo zokuphatha ezikhethekileyo ezifana neekhreyini kunye neziphakamisi.Ukongezelela, amacandelo e-granite afuna ukupakishwa ngokucophelela kunye nokuthutha ukukhusela umonakalo ngexesha lokuthunyelwa, okukhokelela kwiindleko ezongezelelweyo kunye nexesha.
Ukuqukumbela, amacandelo e-granite anezinye iingxaki ezinokuchaphazela umgangatho wemveliso ye-semiconductor kunye nemveliso.Ezi ziphene zinokuncitshiswa ngokuphathwa ngononophelo kunye nokugcinwa kwezixhobo zegranite, kubandakanywa nokuhlolwa kwexesha elithile kwii-microfractures kunye neziphene ze-porosity, ukucocwa ngokufanelekileyo ukuthintela ukungcoliseka, kunye nokuphathwa ngononophelo ngexesha lokuthutha.Ngaphandle kweziphene, izinto zegranite zihlala ziyinxalenye ebalulekileyo yenkqubo yokwenziwa kwe-semiconductor ngenxa yomgangatho ophakamileyo wokugqitywa kwawo, ukuqina okuphezulu, kunye nokungcangcazela okugqwesileyo.
Ixesha lokuposa: Dec-05-2023