Ishishini le-semiconductor lehlabathi ngoku lihamba kwixesha lokuchaneka okungakaze kubonwe ngaphambili. Njengoko ubukhulu beempawu kwii-silicon wafers buncipha ukuya kwi-2nm kunye ne-1nm nodes, umda weempazamo kwi-metrology kunye nokuhlolwa uye waphela phantse. Kule meko inzima, kwaneenkqubo ze-optical kunye ne-electron-beam eziphambili zithembeke kuphela njengamaqonga ezihlala kuwo. Le nyaniso ibangele utshintsho olukhulu kushishino lonke: ukuxhomekeka okwandayo kwiigranite engeyiyo imagnethi yokuhlola i-wafernjengezixhobo ezisisiseko kwiindawo zovavanyo ezisebenza ngobuninzi.
Kangangamashumi eminyaka, i-granite yendalo ibisoloko "ingumgangatho wegolide" wobunjineli bokuchaneka ngenxa yokudambisa kwayo okumangalisayo kokungcangcazela kunye ne-coefficient ephantsi yokwanda kobushushu. Nangona kunjalo, kwimeko yokuhlolwa kwe-wafer yanamhlanje, ayizizo zonke i-granite ezidalwe zilingana. Ubukho bezinto ezifakwe kwisinyithi okanye iiminerali zemagnethi kwilitye elisemgangathweni bunokubangela ukuphazamiseka kwendawo yemagnethi. Kwiinkqubo ezisebenzisa imisebe ye-electron okanye ii-sensors zemagnethi ezibuthathaka, ukuphazamiseka okunjalo kuyintlekele, okukhokelela ekuphambukeni kwemisebe kunye nokungachaneki komlinganiselo okuphazamisa yonke inkqubo yokulawula umgangatho.
I-ZHHIMG ichithe iminyaka iphucula inkqubo yokukhetha ukuze ifumane ukwakheka kwejoloji okunobuthathaka obuphantsi kakhulu bemagnethi. Ngokubonelela ngeneneigranite engeyiyo imagnethi yokuhlola i-wafer, senza abavelisi bezixhobo bakwazi ukutyhala imida yesisombululo ngaphandle "kwengxolo" ephazamisa izinto ezincinci. Le ngcaciso yobuchwephesha yiyo eyahlula isixhobo sokuhlola esiqhelekileyo kwi-metrology suite ekumgangatho wehlabathi ekwaziyo ukugcina ukuphindaphindwa kwe-sub-nanometer.
Ngokuhambelana neemfuno zemagnethi kukho imfuneko engenakuphikiswana ngayo yokucoceka kokusingqongileyo. KwiFab yanamhlanje, iqonga kufuneka lenze okungaphezulu nje kokuma; kufuneka lihlale "lingabonakali" kokusingqongileyo. Kulapho ke ingcamango ye-"a"iqonga legranite elihambelana negumbi lokucocakuba yinto ebalulekileyo. Izixhobo zoshishino zemveli zihlala zisilela kwiindawo ezingenanto okanye ezicocekileyo kakhulu ngenxa yokukhupha igesi—ukukhutshwa kweegesi ezivalelekileyo okanye iikhompawundi eziphilayo eziguquguqukayo ezinokungcolisa i-optics okanye zihlale kumphezulu we-wafer, nto leyo ebangela “iziphene ezibulalayo” ezitshabalalisayo.
Ifilosofi yobunjineli be-ZHHIMG iphatha umphezulu wegranite njengento esebenza kakhulu endaweni yokuba yibhloko yelitye engashukumiyo. Ukucubungula kwethu okukhethekileyo kuqinisekisa ukuba yonke intoiqonga legranite elihambelana negumbi lokucocaidlula kwinkqubo yokucocwa nokutywinwa okungqongqo eyenzelwe ukuphelisa ukuchitheka kwee-micro-particles. Eli nqanaba lokuthembeka kwezinto libalulekile kwi-lithography kunye nezixhobo zokuhlola ezisebenza kwigumbi lokucoca leKlasi 1 okanye le-ISO 3, apho nokuba yisuntswana enye elahlekileyo inokubangela ukuba isivuno silahleke ngamawaka eedola.
Ngaphaya kweempawu ezibonakalayo zelitye ngokwalo, ukudibanisa i-granite kwisakhiwo somatshini esibanzi kufuna ukuqonda okunzulu ngeendlela zokwakha. Ii-OEM eziphambili ze-semiconductor zaseYurophu naseMelika azisafuni ababoneleli abalula; zifuna amaqabane asebenzisanayo aqonda uxinzelelo lobushushu nolwe-mechanical lokuphathwa kwe-wafer ngesantya esiphezulu iiyure ezingama-24/7. Ubungcali be-ZHHIMG ekufakeni ngokuchanekileyo kunye nokufakwa ngokwezifiso kuvumela ukuhlanganiswa okungenamthungo kwezigaba zomoya kunye nee-motor ezithe ngqo kwisiseko se-granite, kudala inkqubo edibeneyo enciphisa iimpazamo zokuqokelela.
Njengoko sijonge kwikamva leshishini, indima yesiseko solwakhiwo iya kukhula ngokubaluleka. Ngokufika kwe-High-NA EUV lithography kunye ne-3D NAND scaling, ubunzima kunye nozinzo lweigranite engeyiyo imagnethi yokuhlola i-waferAmaqonga kufuneka aphuhlise ukuze akwazi ukujongana nokukhawuleziswa okuphezulu kunye nemithwalo enzima ngakumbi yobushushu. I-ZHHIMG iphambili kolu tshintsho, ityale imali kwizixhobo ze-metrology eziphambili ukuqinisekisa ukuba zithe tyaba kwaye ziyafana nokunyamezelana okwakucingelwa ukuba akunakwenzeka kwiminyaka elishumi eyadlulayo.
Ukuzinikela ekugqweseni kwi-ZHHIMG kuqhutywa kukuqonda ukuba kwihlabathi le-semiconductor, uzinzo luphambili lokuvelisa izinto ezintsha.iqonga legranite elihambelana negumbi lokucocakungaphezulu kokuthenga; lutyalo-mali ekuthembekeni kwexesha elide komgca wemveliso. Ngokususa ukuphazamiseka kwemagnethi kunye nongcoliseko lwamasuntswana kumthombo, i-ZHHIMG ibonelela ngendawo ezolileyo, ecocekileyo, nezinzileyo efunekayo kwiitships zengomso.
Kwimibutho ezama ukuphucula umgangatho wayo wokuhlola nokunciphisa iindleko zizonke zobunini beeasethi zayo zemetrology, ukukhetha izinto ezisisiseko sesona sigqibo siphambili kwisigaba soyilo. I-ZHHIMG iyaqhubeka nokuxhasa iinkokeli zehlabathi ngokubonelela ngezinto zamatye ezihlangabezana nemigangatho yamazwe ngamazwe engqongqo yobumsulwa nokuchaneka.
Kwihlabathi elichazwa yimicroscope, ukuzinza okukhulu kwe-ZHHIMG granite kusalokhu kungumgcini othuleyo wexesha ledijithali. Simema iinjineli zeenkqubo kunye nabayili bezixhobo ukuba bahlole indlela isayensi yethu yezinto ezizodwa enokuyichaza ngayo kwakhona imida yoko kunokuphunyezwa ziinkqubo zabo zokuhlola.
Ixesha lokuthumela: Matshi-05-2026